Automatic Removing Wax Cleaning Machine for Semiconductor Wafer :
1、Used for semiconductor wafer such as 2", 3", 4", 6" remobing wax and cleaning.
2、Tank is two layers, the outer layer is made of sus316 stainless steel, the internal layer is made
of quartz.
3、Frame is made of stainless square tube, the sealed plate s made of PP plate and the windows is made of transparent PVC plate,material is made in Germany.
4、Can directly connected to cleaning agent unit and DI water system.
5、Ultrasonic debice in the external tank and up and down shaking debice in the internal tank is
the auxiliary of machine.
6、It runs more stable and reliable using manipulator transporting by actuating motor, screw rod and lead rail.
7、Position precision ≤ 0.3 mm and temperature precision ≤0.5 ℃.
8、Waste gas exhausting system, the environment is good.
9、PLC control, Touch screen HMI operation.