1、Mainly using for solar energy removing PSG , cleaning and drying after plasma etching . 2、Cycle time : 5-8 minutes , 1500 pieces in an hour , suitable for 125×125 , 156×156 chip . 3、Especially pure water slowly lifting and hot air drying . 4、It runs more stable and reliable using manipulator transporting by servo motor , screw rod and lead rail . 5、Especially protector avoid the basket and manipulator crushing . 6、Waste gas exhausting system , the environment is good . 7、The independent control box prevent the electrical components from corrosion . 8、PLC control , touch screen HMI operation . |
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